A world class facility to develop the technology

A world class facility to develop the technology

A world class facility to develop the technology needed to fulfill the CITRIS vision. 18 / 9 / 2001 UC Berkeley Microfabrication Laboratory 1 CITRIS Research Priorities Disaster Response - new sensors for rapidly determining casualties, structural integrity, and most effective emergency response Microfabricated neural probe L.P. Lee group Low energy 16mm3 integrated sensor KSJ Pister Group Micromirror Drive Mechanism M.P. Young Energy Efficiency - networked miniature sensors proposed for monitoring building conditions to maximize efficiency of utility systems

18 September 2001 UC Berkeley Microfabrication Laboratory 2 CITRIS Research Priorities Healthcare - discrete sensors for automated or point of use health monitoring. Integration with biological receptor materials of BNC. Electrolytic oxygen microbubbler R.T. Howe, J.D. Keasling groups Biological processing microdevice A.P. Pisano, T.D. Sands groups Transportation - optoelectronic sensors required for analysis of traffic flow to maximize efficiency of transportation networks Environment networked sensors for automated air and water analysis to enable immediate detection of and response to contamination situations 18 September 2001 UC Berkeley Microfabrication Laboratory

3 The Challenge: Integrate Research across several disciplines MEMS ICs Optoelectronics 18 September 2001 UC Berkeley Microfabrication Laboratory Bioelectronics 4 The opportunity: The Integrated Microfabrication Facility Integrated Circuit Design

MEMs Berkeley Sensor and Actuator Center Berkeley Microlab Optoelectronic materials 18 September 2001 UC Berkeley Microfabrication Laboratory 5 Based Upon the Successful Microlab Model: Shared Laboratory Capabilities Common Academic Model: Individual Fiefdoms Successful Microlab Model: Shared Laboratory

The shared model implies professional administration and support staff, funded by per use fees: efficient use of valuable laboratory space significant improvement in quality of support PI research flexibility research cross fertilization 18 September 2001 UC Berkeley Microfabrication Laboratory 6 Existing Microlab / Future IMF: Accessible to All >70 Principal Investigators; 7 departments, >240 active users from UCD, UCSB and UCSD LBL, LLNL, Sandia NL 18 September 2001 UC Berkeley Microfabrication Laboratory 7

A Unique High Tech Incubator among the California Institutes for Science and Innovation The Berkeley Microfabrication Laboratory Affiliates has 28 member companies, many with fewer than 10 employees. The IMF will greatly expand these activities. Adriatic Research Institute MicroAssembly Tech Onix Microsystems, Inc. Advanced Integrated Photonics Emitronix, Inc. MicroGen Systems Paracer, Inc. Alien Technology Corp. General Nanotechnology Molecular Reflections

Photon Imaging, Inc. Analog Devices GENOA Corporation Nanochip, Inc. Progressant Technologies Bandwidth9 Hewlett-Packard Company NewPeregrine, Inc. Bluefox Jet Propulsion Laboratory Network Photonics Inc. Sandia National Lab Covalent Materials, Inc.

MEMS PI OMM, Inc. 18 September 2001 DICon Fiberoptics, Inc. UC Berkeley Microfabrication Laboratory Robert Bosch Corporation 8 Integrated Microfabrication Facility Compound MEMs processing semiconductor compatible with processing for biologically modified integration of substrates and

optoelectronic silicon ICs Silicon Integrated components circuit fabrication with better than Berkeley m minimum Integrated Bioengineering 0.25Microlab geometries Nanotechnology Materials Center Laboratory Education - fiber connected teaching laboratories for long distance learning and remote access to specialized analytical equipment. 18 September 2001 UC Berkeley Microfabrication Laboratory 9

Significant Infrastructure Requirements 20,000 ft2 Class 100 clean room (1st floor) 16-20 ft ceilings and 20-30 ft spans critical for equipment installation 8 silicon, 8/6 MEMs, optoelectronics, and multi-substrate integration 16,000 ft2 utilities and support (basement / roof / perimeter) 5000 gal DI water, 7gpm, 60gpm non-DI recirc. chilled water 30 changes per hour air filtering, 60 ft3/min 80-100psi clean dry air multiple hazardous gas and liquid effluent treatment systems 300 tons cooling capacity, >50,000 ft3/min supply and exhaust air 9000 gal liquid nitrogen storage tank, 400 gal liquid oxygen storage toxic and flammable compressed gas delivery and storage area equipment and supplies delivery and staging area 18 September 2001 UC Berkeley Microfabrication Laboratory 10 Significant Space Allocation

18 September 2001 UC Berkeley Microfabrication Laboratory 11 Extensive Equipment Requirements Laboratory construction from CITRIS development funds (~44M) Laboratory equipment funding (~50M) corporate equipment donations existing Microlab equipment new funding Detailed tool lists will include: <.25m photolithography (8, 6 and manual) in house >1m minimum feature mask production thin film deposition (furnace, rapid thermal, and plasma) thin film etching (wet etching and plasma) Analysis (CDSEM, TEM, ellipsometry, profilometry, interferometry) MEMs specific (etch release, supercritical drying,capillary self assembly) packaging (electroplating, dicing, wafer/wire/flipchip bonding) 18 September 2001

UC Berkeley Microfabrication Laboratory 12 Small Feature Reproducibility Group key potential sponsors for equipping IMF Advanced Energy ASML Atmel Corp. Advanced Micro Devices Applied Materials Asyst Technologies Inc. Cymer

Etec Systems Inc. Intel Corporation 18 September 2001 KLA-TENCOR Lam Research Corp. Mykrolis Corp. Nikon Research Corp. Novellus Systems Inc. Silicon Valley Group Schlumberger Tokyo Electron Limited UC Berkeley Microfabrication Laboratory 13

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